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Areas of Research Focus

The Keleher Research Group (KRG) focuses on the design, synthesis, and characterization of nanoparticles and nanocomposite systems for various applications.  This approach relies heavily on the fundamental principles of organic, inorganic, supramolecular, and analytical chemistry while creating a bridge between biology, physics, material science, and engineering. Furthermore, the mechanisms of these processes are little understood, and research to understand the mechanistic driving forces represents a formidable challenge to academic and industrial communities.

Area #1 - Chemical Mechanical Planarization

  • Developing novel slurry formulations for enhanced and controlled material removal rates ​

  • Assessing defectivity and surface quality to develop efficient and effective ”low-stress” processes.​

  • Formulating innovative cleaning chemistries using engineered surfactants, redox-active, and stimuli-responsive additives. 

  • Evaluating molecular structure-property relationships to enhance surface passivation in CMP and p-CMP processes.​

  • Electrochemical evaluation of key interfacial reaction mechanisms that govern CMP and post-CMP processes​.

  • Exploring the role of REDOX additives in modifying nanoparticle surface for enhanced defect-free p-CMP cleaning.​

Area #2 - Topics in Sustainability 

  • Developing next-generation polymeric materials for enhanced carbon capture. ​

  •  Electrochemical remediation of metal-containing water effluent relevant to semiconductor manufacturing processes. 

  • AI-informed development of novel polymeric materials for the effective removal of nanoparticles from semiconductor waste streams.

  • ​Innovation in alternative fuel sources and remediation of pollutants from the environment with microbial fuel cells. ​

  • ​Project W.A.T.C.H (Water Antigen Tracking with Cellulose Hydrogels)

Area #3 - Topics in Health Safety 

  • Liquid crystal technologies for aviation safety.​

  • Biomimetic polymers for improved wound healing, biological contaminant sensing, and advanced antimicrobial applications.

Current Reserach Collaborators

Our research thrives on collaboration, and it wouldn’t be possible without the invaluable support of our partners, who bring real-world challenges to the table. By working hand-in-hand with industry leaders, we bridge the gap between theoretical advancements and practical solutions. These collaborations not only help us address pressing issues but also inspire innovative approaches to complex problems that have a tremendous impact on current technology development. 

KRG Publications

27. A. Philipossian, Y. Sampurno, F. Redeker, K. Cahue, & J. Keleher.“Slurry Activation for           Enhanced Surface Redox Reactions in CMP.” Solid State Phenomena, 346, 311-317. https://doi.org/10.4028/p-zDs0xu (2023)


26. C. Lippert, J. Landon, J. Keleher, & A. Rassoolkhani. “Integrated Electrochemical Technology for Efficient Metal Recovery in Semiconductor Wastewater.” IEEE Transactions on Semiconductor Manufacturing, PP(99):1-1. https://doi.org/10.1109/TSM.2025.3527310 (2025)


25. Lippert, J. Landon, J. Keleher, & A. Rassoolkhani. “Electrochemical Innovations for Sustainable Copper Management in Semiconductor Wastewater.” 35th Annual SEMI Advanced Semiconductor Manufacturing Conference Proceedings, 1-5. https://doi.org/10.1109/ASMC61125.2024.10545520 (2024)


24. A. Philipossian, Y. Sampurno, F. Redeker, K. Cahue, & J. Keleher. “Slurry Activation for Enhanced Surface Redox Reactions in CMP.” Solid State Phenomena, 346, 311-317. https://doi.org/10.4028/p-zDs0xu (2023)


23. K. A. Cahue, J. L. Powell, A. T. Caridi, R. J. Gentile, P. M. Smith, K. M. Sheets & J. J. Keleher. “Design of “Soft” Cleaning Processes for Emerging Substrates via Stimuli Responsive Chemistry.” Solid State Phenomena, 346, 263-267. https://doi.org/10.4028/p-0oroWO (2023)


22. A. L. Dudek, K. A. Cahue, A. T. Caridi, T. R. Cahue, & J. J. Keleher. “Utilizing an α- β Unsaturated Dicarboxylic Acid for a Defect Initiated Residue Removal During Cu post-Chemical Mechanical Planarization Cleaning.” ECS Journal of Solid State and Technology, 11(12), 123006. https://dx.doi.org/10.1149/2162-8777/aca932 (2022)


21. K. A. Cahue, A. L. Dudek, M. M. Miliauskas, T. R. Cahue, A. L. Mlynarski & J. J. Keleher.“Design of “Low Stress” Post-Chemical Mechanical Planarization (p-CMP) Cleaning Processes for Advanced Technology Nodes.” ECS Transactions, 108(4), 3-15. https://doi.org/10.1149/MA2022-01281242mtgabs (2022)


20. K. M. Wortman-Otto, D. Watson, D. Dussalt, & J. J. Keleher.“Coupling Supramolecular Assemblies and Reactive Oxygen Species (ROS) with Megasonic Action for Applications in Shallow Trench Isolation (STI) Post-Chemical Mechanical Planarization (p-CMP) Cleaning”. ACS Omega, 7, 26029-26039. https://doi.org/10.1021/acsomega.2c00683  (2022)


19. M. H. J. S. Karunarathna, A. N. Linhart, G. E. Giammanco, A. E. Norton, J. J. Chory, J. J. Keleher, & A. D. Ostrowski.“Harnessing Fe(III)–Carboxylate Photochemistry for Radical-Initiated Polymerization in Hydrogels.” ACS Applied BioMaterials, 4(7), 5765–5775. https://doi.org/10.1021/acsabm.1c00525 (2021)


18. Y. Sampurno, A. Philipossian, A. N. Linhart, K. M. Wortman-Otto, W. -T. Tseng, D. Tamboli, & J. J. Keleher. “Understanding the Reasons Behind Defect Levels in Post-Copper-CMP Cleaning Processes with Different Chemistries and PVA Brushes.” ECS Journal of Solid State Science and Technology, 10(6), 064011. https://doi.org/10.1149/2162-8777/ac0b8d (2021)


17. A. N. Linhart, K. M. Wortman-Otto, & J. J. Keleher. Evaluation of a Photosensitizer Redox Couple for Oxide Removal Rate Tunability in Shallow Trench Isolation Chemical Mechanical Planarization.” ECS Journal of Solid State Science and Technology, 10(6), 063001. https://doi.org/10.1149/2162-8777/ac040a (2021)


16. K. M. Wortman-Otto, A. N. Linhart, A. L. Dudek, B. M. Sherry, and J. J. Keleher. “Role of Molecular Structure on Modulating the Interfacial Dynamics for Shallow Trench Isolation (STI) Chemical Mechanical Planarization (CMP) Applications.” ECS Journal of Solid-State Science and Technology. https://doi.org/10.1149/2162-8777/abe7aa (2021)


15. Y. Sampurno, A. N. Linhart, K. M. Wortman-Otto, A. Philipossian, and J. J. Keleher. “Communication-An Analysis of Shear Forces in Post-CMP PVA Brush Scrubbing for Stationary and Rotating Wafers.” ECS Journal of Solid-State Science and Technology. https://doi.org/10.1149/2162-8777/abe4a7 (2021)


14. A. Philipossian, Y. Sampurno, S. Theng, F. Sudargho, K. M. Wortman-Otto, C. F. Graverson, and J. J. Keleher. “Tribological Characterization of Anionic Supramolecular Assemblies in Post-STI-CMP Cleaning Solution Using a Novel Post-CMP PVA Brush Scrubber.” Solid State Phenomena. Invited Publication. https://doi.org/10.4028/www.scientific.net/SSP.314.264 (2021)


13. K.M. Wortman-Otto, A. N. Linhart, A. Mikos, K. Cahue, and J. J. Keleher. “Contact vs. Non-Contact Cleaning: Correlating interfacial reaction mechanisms to processing methodologies for enhanced FEOL/BEOL post-CMP cleaning”. Solid State Phenomena. Invited Publication. https://doi.org/10.4028/www.scientific.net/SSP.314.237 (2021)


12. C.F. Graverson, K. M. Wortman-Otto, A. N. Linhart, Y. Sampurno, A. Philipossian, and J. J. Keleher. “Striking a Balance: Role of Supramolecular Assemblies on the Modulation of the Chemical and Mechanical Contributions during Post-STI CMP Cleaning” Materials Chemistry and Physics. https://doi.org/10.1016/j.matchemphys.2020.124170 (2021)


11. A. Linhart, K. Wortman-Otto, I. Deninger, A. Dudek, H. Lange, D. Danhausen, C. Graverson, T. Beckmann, M. Havens, and J. Keleher. “Strategic design of antimicrobial hydrogels containing biomimetic additives for enhanced matrix responsiveness and HDFa wound healing rates”. ACS Applied Bio Materials. https://doi.org/10.1021/acsabm.0c00525 (2020)


10. K. M. Wortman-Otto, C. F. Graverson, A. N. Linhart, R. K. McDonough, A. L. Mlynarski, and J. J. Keleher. “Synergistic Effect of Pad “Macroporous- Reactors” on Passivation Mechanisms to Modulate Cu Chemical Mechanical Planarization (CMP) Performance” ECS J. Solid State Sci. Technol. https://doi.org/10.1149/2162-8777/ab9b05 (2020)


9. C. F. Graverson, K. M. Wortman-Otto, A. N. Linhart, T. B. Zubi, and J. J. Keleher “Development of “Soft” Cleaning Chemistries for Enhanced STI Post-CMP Cleaning” ECS Trans. 92 165 https://doi.org/10.1149/09202.0165ecst (2019)


8.  T. B. Zubi, R. A. Wiencek, A. L. Mlynarski, J. M. Truffa, K. M. Wortman-Otto, C. Saucedo, M. G. Salinas, C. F. Graverson, and J. J. Keleher “Unraveling Slurry Chemistry/Nanoparticle/Polymeric Membrane Adsorption Relevant to Cu Chemical Mechanical Planarization (CMP) Filtration Applications”. ECS Journal of Solid State Science and Technology: Vol. 8 Iss. 7. https://doi.org/10.1149/2.0041905jss  (2019)


7. T.A. Rickhoff, E. Sullivan, L. K. Werth, D. S. Kissel, and J. J. Keleher “A biomimetic cellulose-based composite material that incorporates the antimicrobial metal-organic framework HKUST-1.” Journal of Applied Polymer Science: Vol. 135. https://doi.org/10.1002/app.46978 (2018)


6. S. Rinehart, T. Campbell, K. Burke, B. Garcia, A. Mlynarski, S. Brain, J. Truffa, J. Rago, W. Chura, J. J. Keleher “Synthesis and Characterization of a Chitosan/PVA Antimicrobial Hydrogel Nanocomposite for Responsive Wound Management Materials” Journal of Microbial & Biochemical Technology https://doi.org/10.4172/1948-5948.1000264 (2016)


5. J. Rech, S. Rinehart, J. Murray, K. Hallenbeck, E. Senese, M. Fernandez, C. Dial, C. Drozd, J. Rago, J. J. Keleher “Synthesis of Photocatalytic Biomimetic Nanocomposite for Enhanced Water Purification,” Journal of Environmental Science: Water Research and Technology https://doi.org/10.1149/MA2016-01/41/2060 (2016)


4. Phillips, R., Bilan, H., Widel, Z., DeMik, R., Brain, S., Moy, M., Crowder, C., Harriman, S., O'Malley, J., Burlas, J., Emmert, S., and Keleher, J. "Measuring the Effectiveness of Photoresponsive Nanocomposite Coatings on Aircraft Windshields to Mitigate Laser Intensity," Journal of Aviation Technology and Engineering: Vol. 4: Iss. 2, Article 5. https://doi.org/10.7771/2159-6670.1105 (2015)


3. DeMik, J. Keleher, N. Kasak, J. Keller, A. Mazza, and J. Raess, "Lead Memory in General Aviation Aircraft Engine Emissions," Journal of Aviation Technology and Engineering: Vol. 1: Iss. 2, Article 5. https://doi.org/10.5703/1288284314660 (2012)


2. Kaiser, J., Connor, P., Levy, P., and Keleher, J. J., (2012) “Role of Abrasive Type and Media Surface Energy on Nanoparticle Adsorption --- International Conference on Planarization Technologies” (ICPT-France) Proceedings for the International Conference on Planarization Technologies (2012).


1. Soderquist, T. J., Chesniak, O. M., Witt, M. R., Paramo, A., Keeling, V. A., & Keleher, J. J. (2012). “Evaluation of the catalytic decomposition of H2O2 through use of organo-metallic complexes - A potential link to the luminol presumptive blood test.” Forensic Science International 219, 101-105. https://doi.org/10.1016/j.forsciint.2011.12.005  (2012)

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